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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

by Saburo Nonogaki , Ueno Takumi , Toshio Ito
Save 35% Save 35%
Current price ₹24,534.00
Original price ₹37,744.00
Original price ₹37,744.00
Original price ₹37,744.00
(-35%)
₹24,534.00
Current price ₹24,534.00

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Book cover type: Hardcover
  • ISBN13: 9780824799519
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: CRC Press
  • Publisher Imprint: CRC Press
  • Publication Date:
  • Pages: 336
  • Original Price: GBP 290.0
  • Language: English
  • Edition: N/A
  • Item Weight: 604 grams
  • BISAC Subject(s): Electronics / Semiconductors

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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