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Microphone Électrodynamique Mems En Technologie CMOS by Tounsi-F

Microphone Électrodynamique Mems En Technologie CMOS

by Tounsi-F
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Book cover type: Paperback
  • ISBN13: 9786131584930
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Omniscriptum
  • Publisher Imprint: Omniscriptum
  • Publication Date:
  • Pages: 172
  • Original Price: GBP 53.0
  • Language: French
  • Edition: N/A
  • Item Weight: 259 grams
  • BISAC Subject(s): Physics / Electricity

Les microsystèmes (MEMS - Micro-Electro-Mechanical Systems) sont des composants miniaturisés réunissant des fonctions électroniques, mécaniques et optiques sur la mème puce. Les technologies microsystèmes conjuguent les techniques du pointe de la microélectronique des semi-conducteurs et les nouvelles techniques du micro-usinage, permettant ainsi la réalisation de systèmes entiers sur une puce (SoC - System on Chip). En plus, cette intégration permettra de miniaturiser le système, d'améliorer ses performances, d'augmenter la sensibilité et de diminuer le bruit grâce à la réduction de la taille des composants et par la suite les capacités parasites dues aux interconnexions. Dans ce cadre vient l'objectif de cette thèse qui a pour but de concevoir et réaliser une nouvelle génération de microphone monolithique de type électrodynamique, à base de bobines spirales planaires, réalisée en technologie standard complétée par un post process de micro-usinage en volume par la face avant.

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