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Microsystems Dynamics by Vytautas Ostasevicius

Microsystems Dynamics

by Vytautas Ostasevicius
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Book cover type: Hardcover
  • ISBN13: 9789048197002
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 214
  • Original Price: EUR 99.99
  • Language: English
  • Edition: N/A
  • Item Weight: 490 grams
  • BISAC Subject(s): Nanotechnology & MEMS, Engineering (General), and Mechanical

Foreword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology for Fabrication of Microswitches; UV Lithography for Fabrication of Micromotors; Common MEMS Actuators; Parallel Plate Capacitors; Comb Drives; Electrostatic Micromotors; Electrostatic Microswitches; Theoretical Background of Multiphysical Interactions Common in Microsystems; Introduction to Coupled-Field Modeling; Electrostatic Actuation and Pull-in Instability; Viscous Air Damping; Vibro-Impact Interactions; Experimental Testing of Microsystem Dynamics; Vibration Excitation Methods; Optical Techniques for Measurement of Vibrations of Microstructures; Study of Elastic Vibro-Impact Macrosystems and Microsystems; Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact; Macrosystems;;Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator; Numerical Modeling and Analysis of Fluidic-Structural Interaction; Numerical Modeling and Analysis of Electrostatic-Structural Interaction; Numerical Modeling and Analysis of Vibro-Impact Interaction; Numerical Analysis of the Micromotor; Finite Element Modeling of Micromotor; Modal Analysis; Micromotor Control; Analytical Model of a Micromotor; Basics of Micromotor Geometry; Torque Analysis; Micromotor Design Guidelines; References

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