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Nanopositioning Technologies: Fundamentals and Applications by Changhai Ru

Nanopositioning Technologies: Fundamentals and Applications

by Changhai Ru
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Book cover type: Hardcover
  • ISBN13: 9783319238524
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 409
  • Original Price: EUR 99.99
  • Language: English
  • Edition: 2016
  • Item Weight: 758 grams
  • BISAC Subject(s): Nanotechnology & MEMS, Electronics / General, and Automation

From the Back Cover
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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