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Oberflächenanalyse von Si/SiGe-Schichten by Sander, Harald

Oberflächenanalyse von Si/SiGe-Schichten

by Harald Sander
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Book cover type: Paperback
  • ISBN13: 9783838651125
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Diplom.de
  • Publisher Imprint: Diplom.de
  • Publication Date:
  • Pages: 96
  • Original Price: GBP 62.9
  • Language: German
  • Edition: N/A
  • Item Weight: 137 grams
  • BISAC Subject(s): Physics / General

Inhaltsangabe: Zusammenfassung: In der vorliegenden Arbeit wurde ein Prozess entwickelt, der es erlaubt, die Versetzungsdichten in Si/SiGe Heterostrukturen zu bestimmen. Dabei wurde im Besonderen Wert auf eine Einführung in die Untersuchungsmethoden der Oberflächenmorphologie von Nanostrukturen, mittels Atomkraft-, Rastertunnel-, und Polarisationsmikroskop, gelegt. Diese Arbeit soll für Interessierte einen erleichterten Einstieg in die Nanostrukturierung, der Methodik und der Terminologie diese Gebietes bringen, um im Anschluss ohne Probleme weiterführende Literatur studieren zu können. Es wird auch speziell auf die Physik von Versetzungen in Festkörpern eingegangen und deren Arten der Sichtbarmachung, dabei werden auch die Grundprinzipien der Chemie von Ätzverfahren für Halbleiter besprochen. Es wurden dabei zwei Verfahren zur Sichtbarmachung von Versetzungen untersucht. Im direkten Verfahren wurden die Proben, welche in der MBE-Anlage in Linz gewachsen wurden, direkt nach dem Wachstum unter das Atomkraftmikroskop gelegt. Dies sollte verhindern, dass sich störende Oxidschichten an der Oberfläche bilden und das Scannen der Oberfläche erschweren. Hierbei wurde auch der Einfluss eines Reinigungsschrittes, der aus H2SO4, HF und Methanol besteht, auf die Qualität der Scans untersucht. Es wurde versucht, direkt Versetzungsspiralen sichtbar zu machen. Dies erwies sich aus verschiedenen Gründen als eine sehr schwierige Aufgabe, und es gelang nur, laterale mono- und doppelatomare Stufen aufzulösen. Als indirektes Verfahren wurde ein Versetzungsätzprozess auf der Basis von Cr(VI)O3 entwickelt. Diese Lösung ätzt selektiv die Probenoberfläche an den Stellen schneller an, an denen Fadenversetzungen die Oberfläche durchsto en. Die Fadenversetzungsdichte kann hier mit Hilfe eines Polarisationsmikroskops bestimmt werden. Inhaltsverzeichnis: Inhaltsverzeichnis: 1.Zusammenfassung1 2.Einleitung2 3.Si/SiGe Materialsystem4 3.1Allgemeines4 3.2Bandstruktur4 3.3Effektive Mass

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