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Plasma Etching: Fundamentals and Applications

by Minoru Sugawara , M. Sugawara , Barry L. Stansfield
Save 17% Save 17%
Current price ₹24,949.00
Original price ₹29,939.00
Original price ₹29,939.00
Original price ₹29,939.00
(-17%)
₹24,949.00
Current price ₹24,949.00

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Book cover type: Hardcover
  • ISBN13: 9780198562870
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: OUP Oxford
  • Publisher Imprint: OUP Oxford
  • Publication Date:
  • Pages: 356
  • Original Price: GBP 175.0
  • Language: English
  • Edition: N/A
  • Item Weight: 681 grams
  • BISAC Subject(s): Electrical

This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.

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