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Plasma Processing of Semiconductors by P. F. Williams

Plasma Processing of Semiconductors

by P. F. Williams
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Book cover type: Hardcover
  • ISBN13: 9780792345671
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 613
  • Original Price: EUR 299.99
  • Language: English
  • Edition: 1997
  • Item Weight: 1080 grams
  • BISAC Subject(s): Electronics / Semiconductors, Electrical, and Manufacturing

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

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