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Polycrystalline Silicon for Integrated Circuit Applications

by Ted Kamins
Save 35% Save 35%
Current price ₹11,017.00
Original price ₹16,949.00
Original price ₹16,949.00
Original price ₹16,949.00
(-35%)
₹11,017.00
Current price ₹11,017.00

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Book cover type: Paperback
  • ISBN13: 9781461289494
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 290
  • Original Price: EUR 149.99
  • Language: English
  • Edition: Softcover Repri
  • Item Weight: 467 grams
  • BISAC Subject(s): General, Electronics / General, and Electrical

Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa- tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor- mance. As device performance improves, however, some of the proper- ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili- con also need to be better understood to minimize potential degradation of circuit behavior.

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