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Pós e filmes espessos KNN para dispositivos MEMS by Tony Lusiola, Robert Dorey

Pós e filmes espessos KNN para dispositivos MEMS

by Tony Lusiola , Robert Dorey
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Book cover type: Paperback
  • ISBN13: 9786209489792
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Edicoes Nosso Conhecimento
  • Publisher Imprint: Edicoes Nosso Conhecimento
  • Publication Date:
  • Pages: 68
  • Original Price: GBP 34.71
  • Language: Portuguese
  • Edition: N/A
  • Item Weight: 105 grams
  • BISAC Subject(s): General

Os materiais piezoel�tricos sem chumbo ganharam import�ncia devido ao aumento da preocupa��o ambiental relacionada � presen�a de chumbo e � legisla��o subsequente que surgiu, incluindo diretivas como a Diretiva Res�duos de Equipamentos El�tricos e Eletr�nicos (WEEE) e a Diretiva Restri��o de Subst�ncias Perigosas (RoHS). Embora tenha havido muitos progressos na produ��o de materiais a granel sem chumbo, a necessidade de integrar esses materiais piezoel�tricos sem chumbo de �ltima gera��o com substratos para formar microdispositivos funcionais recebeu menos aten��o e levanta uma s�rie de desafios. No que diz respeito ao m�todo de s�ntese de �xido misto a alta temperatura, foi desenvolvido um m�todo simples, econ�mico e robusto de s�ntese de hidr�xido fundido a baixa temperatura (MHS), derivado do m�todo de s�ntese de sal fundido (MSS), para produzir p�s de gr�o pequeno K0,5Na0,5NbO3 (KNN), sendo um m�todo que se presta facilmente � escala industrial. Foi utilizada uma t�cnica de forma��o de pel�cula de tinta composta por p�/sol-gel para produzir pel�culas espessas de KNN em substratos de sil�cio. A caracteriza��o das pel�culas produzidas mostrou que estas exibem coeficientes piezoel�tricos para material n�o dopado na regi�o de 30 pC/N.

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