Principles of Microelectromechanical Systems

Name: Principles of Microelectromechanical Systems
Brand: Wiley-IEEE Press
SKU: 9780470466346
Price: 18045.0 INR
Availability: InStock

by Ki Bang Lee

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ISBN13: 9780470466346
Binding: Hardcover
Subject: N/A
Publisher: Wiley-IEEE Press
Publisher Imprint: Wiley-IEEE Press
Publication Date: February 2, 2011
Pages: 667
Original Price: USD 197.95
Language: English
Edition: N/A
Item Weight: 1157 grams
BISAC Subject(s): Electronics / Microelectronics

About The Book

The building blocks of MEMS design through closed-form solutions

Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications.

Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes:

Statics/force and moment acting on mechanical structures in static equilibrium

Static behaviors of structures consisting of mechanical elements

Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations

Fluid flow in MEMS and the evaluation of damping force acting on the moving structures

Basic equations of electromagnetics that govern the electrical behavior of MEMS

Combining the MEMS building blocks to form actuators and sensors for a specific purpose

All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms.

This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.

About The Author

ki bang lee, PhD, is Director of KB Lab in Singapore. He has made numerous contributions in micro- and nano-electromechanical systems. From 2000 to 2004, Dr. Lee was a researcher at University of California, Berkeley. He worked for Samsung during 1987-2000, most recently holding the position of principal research scientist. He earned his PhD in mechanical engineering at Korea Advanced Institute of Science and Technology (KAIST).

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