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Rapid Thermal Processing of Semiconductors by Victor E. Borisenko

Rapid Thermal Processing of Semiconductors

by Victor E. Borisenko
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Book cover type: Paperback
  • ISBN13: 9781489918062
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 358
  • Original Price: EUR 219.99
  • Language: English
  • Edition: Softcover Repri
  • Item Weight: 578 grams
  • BISAC Subject(s): Electronics / Semiconductors, Materials Science / Electronic Materials, and Physics / Condensed Matter

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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