Raster-Elektronenmikroskopie

Name: Raster-Elektronenmikroskopie
Brand: Springer
SKU: 9783540081548
Price: 6178.0 INR
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by L. Reimer , G. Pfefferkorn

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ISBN13: 9783540081548
Binding: Paperback
Subject: N/A
Publisher: Springer
Publisher Imprint: Springer
Publication Date: June 1, 1977
Pages: 284
Original Price: EUR 84.1
Language: German
Edition: 2., Neubearb. U
Item Weight: 481 grams
BISAC Subject(s): Physics / Condensed Matter

About The Book

1. 1. Prinzipielle Wirkungsweise und Betriebsarten eines Raster-Elektron- mikroskopes (SEM) . . . . . . . . . . . . . . . . . . . . 1 . . 1. 2. Vergleich des Raster-Elektronenmikroskopes mit dem Lichtmikroskop und Transmissions-Elektronenmikroskop . . . . . . . . . . . . . 3 1. 3. Vergleich des Raster-Elektronenmikroskopes mit anderen Elektron- strahlgeraten . . . . . . . . . . . . . . 9 Literatur zu 1 . . . . . . . . . . . . . . . 14 Monographien, Tagungsbande und Bibliographien 14 2. Wechselwirkung Elektron-Materie 2. 1. Einleitung 16 2. 2. Elektronenstreuung am Einzelatom 17 2. 2. 1. Elastische Streuung . . . . 17 2. 2. 2. Unelastische Streuung 18 2. 3. Streuung in einer durchstrahlbaren Schicht 21 2. 3. 1. Winkelverteilung gestreuter Elektronen 21 2. 3. 2. Transmission als Funktion der Beobachtungsapertur 23 2. 3. 3. Ortsverteilung gestreuter Elektronen . 24 2. 3. 4. Energieverteilung gestreuter Elektronen 25 2. 4. Elektronendiffusion in kompaktem Material 28 2. 4. 1. Transmission und Reichweite 28 2. 4. 2. Ausdehnung der Diffusionswolke . . 31 2. 4. 3. Ionisationsdichte und Tiefendosiskurve 33 2. 5. Ruckstreuung und Sekundarelektronen-Emission 34 2. 5. 1. Definition und Messung dieser GraBen . . 34 2. 5. 2. Ruckstreukoeffizient einer dunnen Schicht, Austrittstiefe 36 2. 5. 3. Ruckstreukoeffizient von kompaktem Material . . . . 37 2. 5. 4. Richtungs-und Energieverteilung ruckgestreuter Elektronen 40 2. 5. 5. Ausbeute, Energie und Austrittstiefe der Sekundarelektronen 41 2. 5. 6. Beitrag der ruckgestreuten Elektronen zur Sekundarelektron- ausbeute . . . . . . . . . . . . . . . 45 2. 5. 7. Rauschen der Sekundarelektronenemission . . . . . . . . . 45 VIII Inhalt 2. 6. Ausbreitung der Elektronen in Kristallen . . . . 47 2. 6. 1. Das Elektronenwellenfeld in einem Kristall 47 2. 6. 2. Beugung in Transmission . . . . . . . . 51 2. 6. 3. EinfluB der Beugung auf die Riickstreuung . 54 Literatur zu 2 . . . . . . . . . . . . . . . . . 56 3.

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