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Rutherford-Rückstreu-Analysen Mit Protonen by Hans Mommsen

Rutherford-Rückstreu-Analysen Mit Protonen

by Hans Mommsen
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Book cover type: Paperback
  • ISBN13: 9783531029993
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Vs Verlag Fur Sozialwissenschaften
  • Publisher Imprint: Vs Verlag Fur Sozialwissenschaften
  • Publication Date:
  • Pages: 81
  • Original Price: USD 59.99
  • Language: German
  • Edition: 1980
  • Item Weight: 155 grams
  • BISAC Subject(s): General

Die Rutherford-Rückstreu-Analyse gehÖrt heute zu den Standa- verfahren in der Untersuchung VOn Oberflächenschichten. Ihre Fähigkeit der Tiefenrnikroskopie mit einer Tiefenauflösung von - einigen 100 A wird vor allem zu Materialuntersuchungen in der Halbleitertechnologie und der Kernenergietechnologie genutzt. Das starke Interesse, das diese Methode gefunden hat, lä t es wünschenswert erscheinen, diese deutschsprachige Beschreibung zu veröffentlichen. Obwohl hier speziell die Verwendbarkeit der Rückstreuung zu Analysezwecken bei kleinen Energien, wie sie von Niederenergiebeschleunigern geliefert werden, unt- sucht wird, wurde diese Arbeit so verfa t, da sie auch als allgemeine Einführung in die Methode verstanden werden kann. Ihr liegt die Diplomarbeit von Herrn A. Weller zugrunde, der den elektrostatischen Analysator gebaut sowie das Spektrensimu- lationsprogramm geschrieben hat (Institut für Strahlen- und Ke- physik, Bonn, 1979). - 3 - Zusammenfassung Die Methode der Rutherford-Rückstreuung (RBS) erlaubt es, quan- titative Analysen dünner Folien und Oberflächenanalysen mit hoher Empfindlichkeit und guter Genauigkeit durchzuführen. Zusätzlich wird Information über die Elementverteilung in einer Probe in Abhängigkeit von der Tiefe unter der Oberfläche erhal- ten. Besonders diese Möglichkeit der Tiefenprofilmessung zeich- net die RBS vor anderen physikalischen Analysemethoden aus.

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