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Semiconductor Strain Metrology: Principles and Applications by Terence K. S. Wong

Semiconductor Strain Metrology: Principles and Applications

by Terence K. S. Wong
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Book cover type: Paperback
  • ISBN13: 9781608055548
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Bentham Science Publishers
  • Publisher Imprint: Bentham Science Publishers
  • Publication Date:
  • Pages: 144
  • Original Price: USD 107.0
  • Language: English
  • Edition: N/A
  • Item Weight: 481 grams
  • BISAC Subject(s): Applied Sciences

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.

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