Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

Name: Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments
Brand: Springer
SKU: 9783658192372
Price: 3633.0 INR
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by Alexey Ivanov

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ISBN13: 9783658192372
Binding: Paperback
Subject: N/A
Publisher: Springer
Publisher Imprint: Springer Vieweg
Publication Date: September 22, 2017
Pages: 316
Original Price: EUR 49.99
Language: English
Edition: 2018
Item Weight: 449 grams
BISAC Subject(s): Nanotechnology & MEMS, Applied, and Mechanics / Thermodynamics

About The Book

From the Back Cover

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Contents

Silicon Anodization: State of the Art
Experimental, Characterization and Simulation Methods
Microscale Study of Anodization Process
Anodization Process as a Structuring Technique: Experiments and Simulation

Target Groups

Researchers and students of microsystems technology, electrochemistry, microengineering
Practitioners in the area of microsystems, silicon processing and electrochemical material processing

The Author
Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

About The Author

Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

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