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Silizium-Halbleitertechnologie: Grundlagen Mikroelektronischer Integrationstechnik by Ulrich Hilleringmann

Silizium-Halbleitertechnologie: Grundlagen Mikroelektronischer Integrationstechnik

by Ulrich Hilleringmann
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Book cover type: Paperback
  • ISBN13: 9783658423773
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer Vieweg
  • Publisher Imprint: Springer Vieweg
  • Publication Date:
  • Pages: 309
  • Original Price: EUR 37.37
  • Language: German
  • Edition: 8. Aufl. 2023
  • Item Weight: 518 grams
  • BISAC Subject(s): Electronics / Semiconductors

Das Lehrbuch behandelt die Grundlagen und die technische Durchführung der Einzelprozesse zur mikroelektronischen Schaltungsintegration in der Silizium-Halbleitertechnologie. Die Integrationstechnik setzt sich aus einer Vielzahl von sich wiederholenden Einzelprozessen zusammen, deren Durchführung und apparative Ausstattung extremen Anforderungen genügen müssen, um die geforderten Strukturgrö en bis zu wenigen Nanometern gleichmä ig und reproduzierbar zu erzeugen. Das Zusammenspiel der Oxidationen, Ätzschritte und Implantationen zur Herstellung von MOS- und Bipolarschaltungen werden - ausgehend vom Rohsilizium bis zur gekapselten integrierten Schaltung - aus Sicht der Prozessführung erläutert. Moderne 3D-Bauformen für Feldeffekttransistoren runden den Inhalt ab.

Prof. Dr.-Ing. Ulrich Hilleringmann leitet das Fachgebiet Sensorik an der Universität Paderborn und lehrt Halbleitertechnologie, Mikrosystemtechnik, Sensorik und Prozessmesstechnik.

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