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Spectroscopic Techniques for Semiconductor Industry by Vladimir Protopopov

Spectroscopic Techniques for Semiconductor Industry

by Vladimir Protopopov
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Book cover type: Hardcover
  • ISBN13: 9789811257599
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: World Scientific Publishing Company
  • Publisher Imprint: World Scientific Publishing Company
  • Publication Date:
  • Pages: 324
  • Original Price: USD 118.0
  • Language: English
  • Edition: N/A
  • Item Weight: 1044 grams
  • BISAC Subject(s): Physics / Optics & Light

The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing.Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers.Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas.

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