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Technologien Der Mikrosysteme by Ha Duong Ngo

Technologien Der Mikrosysteme

by Ha Duong Ngo
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Book cover type: Paperback
  • ISBN13: 9783658374976
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer Vieweg
  • Publisher Imprint: Springer Vieweg
  • Publication Date:
  • Pages: 246
  • Original Price: EUR 37.37
  • Language: German
  • Edition: 1. Aufl. 2022
  • Item Weight: 418 grams
  • BISAC Subject(s): Electronics / General

Das Buch vermittelt die Grundlagen zur Herstellung und dem Aufbau von Mikrosystemen. Es kann in zwei Teile aufgeteilt werden. Der Schwerpunkt von Teil I liegt hierbei auf den Mikrofertigungsprozessen und behandelt die Siliziumtechnologie, mikromechanische Strukturierungs- (anisotropes Ätzen, DRIE) und Bondprozesse (Eutectic Bonding, Fusion Bonding). Teil II behandelt die Aufbau- und Verbindungstechnik für Mikrosysteme und vermittelt Kenntnisse zu den Prinzipien der Chipmontage. Dabei stehen u.a. die Beschichtungstechnologien (Metallisierungssysteme) und Kontaktiertechnologien (Löten, Kleben, Bonden) im Vordergrund.

Ha Duong Ngo ist seit 2012 Professor für Mikrosystemtechnik und Mikrosensorik an der Hochschule für Technik und Wirtschaft Berlin. Von 2015 bis 2021 war er Gruppenleiter Mikrosensorik am Fraunhofer Institut IZM Berlin. Davor war er Oberingenieur an der Technische Universität Berlin auf dem Gebiet Mikrosensor/Mikroaktuatorik und Referent Technologie bei Firma Schott AG.

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