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Thermoelectrical Effect in Sic for High-Temperature Mems Sensors by Toan Dinh

Thermoelectrical Effect in Sic for High-Temperature Mems Sensors

by Toan Dinh
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Book cover type: Paperback
  • ISBN13: 9789811325700
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 115
  • Original Price: EUR 49.99
  • Language: English
  • Edition: 2018
  • Item Weight: 205 grams
  • BISAC Subject(s): Nanotechnology & MEMS, Physics / Condensed Matter, and Nanoscience

From the Back Cover

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

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