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Thin Films on Silicon: Electronic and Photonic Applications by Vijay Narayanan, Martin M. Frank, Alexander A. Demkov

Thin Films on Silicon: Electronic and Photonic Applications

by Vijay Narayanan , Martin M. Frank , Alexander A. Demkov
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Book cover type: Hardcover
  • ISBN13: 9789814740470
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: World Scientific Publishing Company
  • Publisher Imprint: World Scientific Publishing Company
  • Publication Date:
  • Pages: 552
  • Original Price: USD 200.0
  • Language: English
  • Edition: N/A
  • Item Weight: 1112 grams
  • BISAC Subject(s): Electronics / Semiconductors

This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.

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