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Traitement Plasma de Materiaux Organosilicies En Microelectronique by Eon-D

Traitement Plasma de Materiaux Organosilicies En Microelectronique

by Eon-D
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Book cover type: Paperback
  • ISBN13: 9786131537745
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Omniscriptum
  • Publisher Imprint: Omniscriptum
  • Publication Date:
  • Pages: 264
  • Original Price: GBP 69.0
  • Language: French
  • Edition: N/A
  • Item Weight: 391 grams
  • BISAC Subject(s): Electronics / General

L'objet de cette étude est la gravure par plasma de matériaux hybrides SiOC(H). Leurs propriétés ajustables entre organiques et inorganiques leurs donnent de grandes potentialités. Ce travail est dédié à deux applications en microélectronique. 1)L'étude s'est portée sur des polymères à base de Polyhedral oligomeric silsesquioxane appliquée à la lithographie optique. Les analyses ont été particulièrement poussées au moyens de mesures XPS et d'ellipsométrie. Ce travail a mis en évidence des effets de ségrégation en surface et a permis de développer un modèle de la gravure en plasma oxydant. 2) Les matériaux SiOC(H) peuvent être utilisé comme isolant d'interconnexion grâce à leur faible permittivité. Les plasmas fluorocarbonés ont servi à obtenir une vitesse de gravure élevée et une grande sélectivité avec le masque en SiC(H). Les caractérisations montrent que la composition du matériau est modifiée sur quelques nanomètres, avec une diminution de la quantité de carbone et qu'une deuxième couche fluorocarbonée s'y superpose. Des mesures du flux ionique et de la quantité de fluor atomique permettent de mieux appréhender les mécanismes de gravure qui régissent ces matériaux.

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