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User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition by U. S. Department of Commerce

User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition

by U. S. Department of Commerce
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Book cover type: Paperback
  • ISBN13: 9781499211931
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Createspace Independent Publishing Platform
  • Publisher Imprint: Createspace Independent Publishing Platform
  • Publication Date:
  • Pages: 254
  • Original Price: USD 19.99
  • Language: English
  • Edition: N/A
  • Item Weight: 595 grams
  • BISAC Subject(s): General

The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.

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