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Wafer Fabrication: Automatic Material Handling System by Jie Zhang, Huazhong University of Science and Techn

Wafer Fabrication: Automatic Material Handling System

by Jie Zhang , Huazhong University of Science and Techn
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Book cover type: Hardcover
  • ISBN13: 9783110486902
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: de Gruyter
  • Publisher Imprint: de Gruyter
  • Publication Date:
  • Pages: 284
  • Original Price: GBP 130.5
  • Language: English
  • Edition: N/A
  • Item Weight: 654 grams
  • BISAC Subject(s): Manufacturing

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Jie Zhang, Shanghai Jiaotong University, Shanghai, China

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